Author:
Hoshino Yasushi,Arima Hiroki,Saito Yasunao,Nakata Jyoji
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
4 articles.
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1. Impact of Metals on Silicon Devices and Circuits;Metal Impurities in Silicon- and Germanium-Based Technologies;2018
2. Thermal behavior of metal layers sandwiched by silicon dioxide layers;Japanese Journal of Applied Physics;2015-07-15
3. Analysis of depth redistribution of implanted Fe near SiO2/Si interface;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-11
4. Carbon nanotube growth from catalytic nano-clusters formed by hot-ion-implantation into the SiO2/Si interface;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2012-07