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Electromechanical Displacement Detection With an On-Chip High Electron Mobility Transistor Amplifier

  • Published:2011-06-20 Issue:6 Volume:50 Page:06GJ01
  • ISSN:0021-4922
  • Container-title:Japanese Journal of Applied Physics
  • language:en
  • Short-container-title:Jpn. J. Appl. Phys.

Author:

Oda Yasuhiko,Onomitsu Koji,Kometani Reo,Warisawa Shin-ichi,Ishihara Sunao,Yamaguchi Hiroshi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Suspended semiconductor nanostructures: physics and technology;Journal of Physics: Condensed Matter;2022-04-25

2. GaAs-based micro/nanomechanical resonators;Semiconductor Science and Technology;2017-09-11

3. Integrated On-Chip Nano-Optomechanical Systems;International Journal of High Speed Electronics and Systems;2017-02-17

4. Room temperature, very sensitive thermometer using a doubly clamped microelectromechanical beam resonator for bolometer applications;Applied Physics Letters;2016-04-18

5. Direct fabrication of a W-C SNS Josephson junction using focused-ion-beam chemical vapour deposition;Journal of Micromechanics and Microengineering;2014-04-11
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