Analysis ofH2-DilutionEffects on Photochemical Vapor Deposition of Si Thin Films
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 23 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effect of hydrogen dilution on intrinsic a-Si:H layer between emitter and Si wafer in silicon heterojunction solar cell;Solar Energy Materials and Solar Cells;2008-03
2. Effects of deposition pressure on the microstructural and optoelectrical properties of B-doped hydrogenated nanocrystalline silicon (nc-Si:H) thin films grown by hot-wire chemical vapor deposition;Microelectronics Journal;2008-01
3. Low-temperature Deposition of Hydrogenated Microcrystalline Silicon Thin Films by Photochemical Vapor Deposition Technique and Their Application to Thin Film Solar Cells;Japanese Journal of Applied Physics;2007-04-05
4. Intrinsic Microcrystalline Silicon Thin Films Prepared by Hot-Wire Cell Method and Their Application to Solar Cells;Japanese Journal of Applied Physics;2004-12-09
5. Substitutional C Incorporation into Si1-yCyAlloys Using Novel Carbon Source, 1,3-Disilabutane;Japanese Journal of Applied Physics;2004-07-07
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