Directional Etching of Silicon by Silver Nanostructures
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering
Link
http://stacks.iop.org/1882-0786/4/i=2/a=025001/pdf
Reference16 articles.
1. Motility of Metal Nanoparticles in Silicon and Induced Anisotropic Silicon Etching
2. Ultrathin silicon nitride gate dielectrics prepared by catalytic chemical vapor deposition at low temperatures
3. Using Self-Assembled Nanoparticles to Fabricate and Optimize Subwavelength Textured Structures in Solar Cells
4. Ordered nanopore boring in silicon: Metal-assisted etching using a self-aligned block copolymer Au nanoparticle template and gravity accelerated etching
5. Extended Arrays of Vertically Aligned Sub-10 nm Diameter [100] Si Nanowires by Metal-Assisted Chemical Etching
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