Fabrication of Nanoparticle Composite Porous Films Having Ultralow Dielectric Constant-Reference-Cited by-同舟云学术

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Fabrication of Nanoparticle Composite Porous Films Having Ultralow Dielectric Constant

Published:2005-12-02 Issue:No. 50 Volume:44 Page:L1509-L1511
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Nunomura Shota,Koga Kazunori,Shiratani Masaharu,Watanabe Yukio,Morisada Yoshinori,Matsuki Nobuo,Ikeda Shingo

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 47 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication of amorphous LiPON, LiAlGePO, and GeSn films in low-temperature plasma sputtering process for all-solid-state Li⁺-ion battery;Japanese Journal of Applied Physics;2023-06-08

2. Non-classical Crystallization of Bulk Crystals in Solution and of Thin Films in the Gas Phase by Chemical Vapor Deposition;Electronic Materials Letters;2021-10-18

3. Plasma-Induced Electronic Defects: Generation and Annihilation Kinetics in Hydrogenated Amorphous Silicon;Physical Review Applied;2018-11-02

4. Synthesis of nanostructures using charged nanoparticles spontaneously generated in the gas phase during chemical vapor deposition;Journal of Physics D: Applied Physics;2018-10-17

5. Carbon-encapsulated metal nanoparticles deposited by plasma enhanced magnetron sputtering;Vacuum;2018-04

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