Anti-Sticking Effect of Organic Dielectric Formed by Electrodeposition in Microelectromechanical-System Structures-Reference-Cited by-同舟云学术

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Anti-Sticking Effect of Organic Dielectric Formed by Electrodeposition in Microelectromechanical-System Structures

Published:2005-07-26 Issue:7B Volume:44 Page:5732-5735
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Sakata Tomomi,Ishii Hiromu,Okabe Yuichi,Nagase Masao,Kamei Toshikazu,Kudou Kazuhisa,Yano Masaki,Machida Katsuyuki

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Electrodeposition of Water-Repellent Organic Dielectric Film as an Anti-Sticking Coating on Microelectromechanical System Devices;Japanese Journal of Applied Physics;2007-09-20

2. Conformal Coating of Organic Dielectric Film on Gold Electrodes in Microelectromechanical System Devices by Electrodeposition;IEEJ Transactions on Sensors and Micromachines;2007

3. Electrodeposition of Organic Dielectric Film and Its Application to Vibrational Microelectromechanical System Devices;Japanese Journal of Applied Physics;2006-06-20

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