Crystal Orientation Change of Ni Films by Sputtering in Ar-N2Mixed Gases
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Understanding the Preferred Crystal Orientation of Sputtered Silver in Ar/N2 Atmosphere: A Microstructure Investigation;Advances in Materials Science and Engineering;2019-11-06
2. Phase separation within NiSiN coatings during reactive HiPIMS discharges: A new pathway to grow NixSi nanocrystals composites at low temperature;Applied Surface Science;2018-10
3. Sputter-deposition of Ag films in a nitrogen discharge;Thin Solid Films;2006-10
4. Effects of the Ar–N2 sputtering gas mixture on the preferential orientation of sputtered Ru films;Thin Solid Films;2006-01
5. Orientation of metal films deposited by sputtering using Ar/N2 gas mixtures;Thin Solid Films;2004-12
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