A New Inside-Type Segmented Coil Antenna for Uniformity Control in a Large-Area Inductively Coupled Plasma-Reference-Cited by-同舟云学术

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A New Inside-Type Segmented Coil Antenna for Uniformity Control in a Large-Area Inductively Coupled Plasma

Published:2000-06-01 Issue:Part 2, No. 6A Volume:39 Page:L548-L550
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Lee Pyung-Woo,Kim Sung-Sik,Seo Sang-Hun,Chang Choong-Seock,Chang Hong-Young,Ichiki Takanori,Horiike Yasuhiro

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Characteristics of Inductively Coupled Plasma using Internal Double Comb-type Antenna for Flat Panel Display Processing;Japanese Journal of Applied Physics;2007-12-07

2. Two-dimensional fluid simulation of VHF-ICP source with parallel resonance antenna;Computer Physics Communications;2007-07

3. The Effect of Bias Power on the Etching Rate and Uniformity of Silicon Dioxide for N-Slot Inductively Coupled Plasma in TFT Application;Solid State Phenomena;2007-06

4. Characteristics of Parallel Internal-Type Inductively Coupled Plasmas for Large Area Flat Panel Display Processing;Japanese Journal of Applied Physics;2004-07-07

5. Effects of multipolar magnetic fields on the characteristics of plasma and photoresist etching in an internal linear inductively coupled plasma system;Surface and Coatings Technology;2004-01

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