Single-Oriented Growth of (111) Cu Film on Thin ZrN/Zr Bilayered Film for ULSI Metallization-Reference-Cited by-同舟云学术

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Single-Oriented Growth of (111) Cu Film on Thin ZrN/Zr Bilayered Film for ULSI Metallization

Published:2000-10-15 Issue:Part 1, No. 10 Volume:39 Page:5987-5991
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Yanagisawa Hideto,Sasaki Katsutaka,Miyake Hidekazu,Abe Yoshio

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Microstructure, properties and applications of Zr-carbide, Zr-nitride and Zr-carbonitride coatings: a review;Materials Advances;2020

2. Characterization of ZrN, ZrO2 and β′-Zr7 O11 N2 nanoparticles synthesized by pulsed wire discharge;Journal of the American Ceramic Society;2017-06-19

3. Effects of substrate bias and nitrogen flow ratio on the surface morphology and binding state of reactively sputtered ZrNx films before and after annealing;Applied Surface Science;2009-07

4. WITHDRAWN: Effect of substrate temperature on the thermal stability of Cu/Zr–N/Si contact system;Materials Letters;2008-05

5. Mechanistic details of atomic layer deposition (ALD) processes for metal nitride film growth;Journal of Molecular Catalysis A: Chemical;2008-02

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