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Characterization of ZrN, ZrO2 and β′-Zr7 O11 N2 nanoparticles synthesized by pulsed wire discharge

  • Published:2017-06-19 Issue:10 Volume:100 Page:4884-4892
  • ISSN:0002-7820
  • Container-title:Journal of the American Ceramic Society
  • language:en
  • Short-container-title:J Am Ceram Soc

Author:

Lam Do Van1ORCID,Suematsu Hisayuki12,Ogawa Toru13

Affiliation:

1. Department of Nuclear System Safety Engineering; Nagaoka University of Technology; Nagaoka Niigata Japan

2. Extreme Energy-Density Research Institute; Nagaoka University of Technology; Nagaoka Niigata Japan

3. Japan Atomic Energy Agency; Tokai-mura Ibaraki Japan

Funder

Nagaoka University of Technology

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Reference21 articles.

1. Single-oriented growth of (111) Cu film on thin ZrN/Zr bilayered film for ULSi metallization;Yanagisawa;Jpn J Appl Phys,2000

2. Investigation of substrate bias effects on the reactively sputtered ZrN diffusion barrier films;Ruan;Ceram Int,2009

3. Thermally stable ZrN/Zr3N4 bilayered barrier system for through-Si-via process;Takeyama;Jpn J Appl Phys,2008

4. Ogawa T Fuels and Materials for Transmutation Paris OECD Publishing

5. Metal oxynitrides as emerging materials with photocatalytic and electronic properties;Fuertes;Mater Horiz,2015

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