Thin Film Transistors Made from Hydrogenated Microcrystalline Silicon-Reference-Cited by-同舟云学术

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Thin Film Transistors Made from Hydrogenated Microcrystalline Silicon

Published:1994-01-30 Issue:Part 1, No. 1B Volume:33 Page:639-642
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Hsu Kuo-Chiang,Chen Bor-Yir,Hsu Huey-Tzy,Wang Kun-Chih,Yew Tri-Rung,Hwang Huey-Liang

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. P-1.9: Characterization of Self-Aligned Top-Gate Microcrystalline Silicon Thin Film Transistors;SID Symposium Digest of Technical Papers;2018-04

2. Critical issues in plasma deposition of microcrystalline silicon for thin film transistors;Solid-State Electronics;2008-03

3. Effects of NH[sub 3] Plasma Pretreatment before Crystallization on Low-Temperature-Processed Poly-Si Thin-Film Transistors;Journal of The Electrochemical Society;2006

4. The effects of microcrystalline silicon film structure on low-high-low band-gap thin film transistor;Materials Chemistry and Physics;2000-01

5. Stable microcrystalline silicon thin-film transistors produced by the layer-by-layer technique;Journal of Applied Physics;1999-12-15

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