Control of the Harmonics Generation in a Capacitively Coupled Plasma Reactor
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference13 articles.
1. Electrical characteristics of argon radio frequency glow discharges in an asymmetric cell
2. Plasma modeling for a nonsymmetric capacitive discharge driven by a nonsinusoidal radio frequency current
3. Nonlinearity of the radio‐frequency sheath
4. Nonlinear electron resonance heating in capacitive radio frequency discharges
5. Electrical isolation of radio‐frequency plasma discharges
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1. Generation of high-density plasma via transparent electrode in capacitively coupled plasma;Plasma Sources Science and Technology;2024-08-01
2. Higher Order Harmonics Are Suppressed in RF Capacitively Coupled Ar Plasmas Using an External Impedance Circuit;IEEE Transactions on Plasma Science;2024
3. Series resonance effects of a variable inductor termination on the nonpowered electrode in capacitively coupled plasmas;Journal of Vacuum Science & Technology A;2023-07-31
4. Effect of focus ring with external circuit on cathode edge sheath dynamics in a capacitively coupled plasma;Journal of Vacuum Science & Technology A;2023-04-20
5. Effect of parallel resonance on the electron energy distribution function in a 60 MHz capacitively coupled plasma;Plasma Science and Technology;2023-02-08
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