Elementary Analysis of Diamond-Like Carbon Film Formed by Focused-Ion-Beam Chemical Vapor Deposition-Reference-Cited by-同舟云学术

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Elementary Analysis of Diamond-Like Carbon Film Formed by Focused-Ion-Beam Chemical Vapor Deposition

Published:2007-12-06 Issue:12 Volume:46 Page:8003-8004
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Igaki Jun-ya,Saikubo Akihiko,Kometani Reo,Kanda Kazuhiro,Suzuki Tsuneo,Niihara Koichi,Matsui Shinji

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference15 articles.

1. Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

2. Three-dimensional high-performance nano-tools fabricated using focused-ion-beam chemical-vapor-deposition

3. Three-dimensional rotor fabrication by focused-ion-beam chemical-vapor-deposition

4. Mechanical characteristics and its annealing effect of diamondlike-carbon nanosprings fabricated by focused-ion-beam chemical vapor deposition

5. Observation and characteristics of mechanical vibration in three-dimensional nanostructures and pillars grown by focused ion beam chemical vapor deposition

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1. Biomimetic Diamond-like Carbon Coating on a Lumen of Small-diameter Long-sized Tube Modified Surface Uniformly with Carboxyl Group using Oxygen Plasma;Journal of Photopolymer Science and Technology;2022-12-16

2. Effect of Soft X-ray Irradiation on Film Properties of a Hydrogenated Si-Containing DLC Film;Materials;2021-02-15

3. Local Structure Analysis on Si-Containing DLC Films Based on the Measurement of C K-Edge and Si K-Edge X-ray Absorption Spectra;Coatings;2020-03-30

4. Diamond-like carbon film preparation using a high-repetition nanosecond pulsed glow discharge plasma at gas pressure of 1 kPa generated by a SiC-MOSFET inverter power supply;Japanese Journal of Applied Physics;2017-09-12

5. 3-D Nanostructure Fabrication by Focused-Ion Beam, Electron- and Laser Beam;Springer Handbook of Nanotechnology;2017

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