Three-dimensional high-performance nano-tools fabricated using focused-ion-beam chemical-vapor-deposition-Reference-Cited by-同舟云学术

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Three-dimensional high-performance nano-tools fabricated using focused-ion-beam chemical-vapor-deposition

Published:2005-05 Issue:1-4 Volume:232 Page:362-366
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Kometani Reo,Hoshino Takayuki,Kanda Kazuhiro,Haruyama Yuichi,Kaito Takashi,Fujita Jun-ichi,Ishida Masahiko,Ochiai Yukinori,Matsui Shinji

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference5 articles.

1. Nanotweezers consisting of carbon nanotubes operating in an atomic force microscope

2. Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

3. Nozzle-Nanostructure Fabrication on Glass Capillary by Focused-Ion-Beam Chemical Vapor Deposition and Etching

4. Nanomanipulator and actuator fabrication on glass capillary by focused-ion-beam-chemical vapor deposition

5. Characteristics of Nano-Electrostatic Actuator Fabricated by Focused Ion Beam Chemical Vapor Deposition

Cited by 27 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications;Nanoscale;2021

2. Machining processes utilizing mechanical energy;Modern Machining Technology;2020

3. Shape Memory Alloy-Based Microscale Bending Actuator Fabricated by a Focused Ion Beam Chemical Vapor Deposition (FIB-CVD) Gap-Filling Process;International Journal of Precision Engineering and Manufacturing;2019-10-25

4. Failure Mechanism Analysis of Silver Nanowires in Electrochemical Micromachining;IOP Conference Series: Earth and Environmental Science;2019-03-19

5. 3-D Nanostructure Fabrication by Focused-Ion Beam, Electron- and Laser Beam;Springer Handbook of Nanotechnology;2017

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