Comparison of Ni-Metal Induced Lateral Crystallization Thin-Film Transistors Fabricated by Rapid Thermal Annealing and Conventional Furnace Annealing at 565 °C
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
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1. Asymmetric source/drain offset structure for reduced leakage current in polycrystalline-silicon thin-film transistors;Journal of the Society for Information Display;2009
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