High-Rate Deposition of Microcrystalline Silicon Photovoltaic Active Layers by Plasma-Enhanced Chemical Vapor Deposition at Kilo-Pascal Pressures
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference12 articles.
1. Optical absorption and light scattering in microcrystalline silicon thin films and solar cells
2. Origin of the Improved Performance of High-Deposition-Rate Microcrystalline Silicon Solar Cells by High-Pressure Glow Discharge
3. High-deposition-rate of microcrystalline silicon solar cell by using VHF PECVD
4. Influence of Pressure and Plasma Potential on High Growth Rate Microcrystalline Silicon Grown by Very High Frequency Plasma Enhanced Chemical Vapour Deposition
5. Microcrystalline silicon.
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1. Impact of hydrogen radical-injection plasma on fabrication of microcrystalline silicon thin film for solar cells;Journal of Applied Physics;2013-01-21
2. The Development of High-Rate Deposition Technology for Microcrystalline Silicon for High-Efficiency a-Si/μc-Si Tandem Solar Module;IEEE Journal of Photovoltaics;2013-01
3. Importance of Starting Procedure for Film Growth in Substrate-Type Microcrystalline-Silicon Solar Cells;Japanese Journal of Applied Physics;2011-04-20
4. Importance of Starting Procedure for Film Growth in Substrate-Type Microcrystalline-Silicon Solar Cells;Japanese Journal of Applied Physics;2011-04-01
5. Photoacoustic spectroscopy and electron spin resonance studies of defects in microcrystalline silicon thin films grown on rough surfaces;physica status solidi (c);2010-01-27
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