Impact of hydrogen radical-injection plasma on fabrication of microcrystalline silicon thin film for solar cells
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4778608
Reference32 articles.
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5. High Rate Deposition of Microcrystalline Silicon Using Conventional Plasma-Enhanced Chemical Vapor Deposition
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