A Novel Method for Fabrication of Plastic Microlens Array with Aperture Stops for Projection Photolithography-Reference-Cited by-同舟云学术

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A Novel Method for Fabrication of Plastic Microlens Array with Aperture Stops for Projection Photolithography

Published:2007-05-08 Issue:5A Volume:46 Page:2932-2935
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Chang Chih-Yuan,Yang Sen-Yeu,Wu Meng-Sheng,Jiang Liang-Ting,Wang Lon A.

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference6 articles.

1. A novel fabrication method of a microneedle array using inclined deep x-ray exposure

2. Microlens lithography and smart masks

3. Fabrication of Arrays of Microlenses with Controlled Profiles Using Gray-Scale Microlens Projection Photolithography

4. Fabrication of Diffractive and Micro-optical Elements Using Microlens Projection Lithography

5. Reduction Photolithography Using Microlens Arrays: Applications in Gray Scale Photolithography

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A smartphone‐based petrographic microscope;Microscopy Research and Technique;2021-01-13

2. Microfabricated microfluidic platforms for creating microlens array;Optics Express;2017-06-28

3. Fabrication method of low f-number microlens arrays by using surface coating and epoxy dispensing technology;Journal of Micro/Nanolithography, MEMS, and MOEMS;2014-04-28

4. Liquid tunable microlenses based on MEMS techniques;Journal of Physics D: Applied Physics;2013-07-17

5. Directional Difference of Patterns Printed by Scan-Projection Lithography Using a Gradient Index Lens Array;Japanese Journal of Applied Physics;2013-06-01

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