Author:
Völkel R.,Herzig H.P.,Nussbaum Ph.,Blattner P.,Dändliker R.,Cullmann E.,Hugle W.B.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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5. Reactive ion etching of microlens arrays into fused silica;Eisner,1993
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