1. Illumination systems;Räntsch,1938
2. Illumination optics: Köhler integration optics improve illumination homogeneity;Dross,2009
3. Micro-Optics: Enabling Technology for Illumination Shaping in Optical Lithography;Voelkel,2014
4. Resolution Enhancement in Advanced Mask Aligner Lithography;Weichelt,2012
5. Wafer-scale micro-optics fabrication;Voelkel,2012