Mechanism and Modeling of Ring Pattern Formation for Electron Beam Exposure on Zwitterresist-Reference-Cited by-同舟云学术

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Mechanism and Modeling of Ring Pattern Formation for Electron Beam Exposure on Zwitterresist

Published:2003-06-30 Issue:Part 1, No. 6B Volume:42 Page:3838-3841
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Chen Jem-Kun,Ko Fu-Hsiang,Chen Hsuen-Li,Chang Feng-Chih

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/42/i=6S/a=3838/pdf

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