Low-Cost and High-Performance Micro-Fabrication Method Using Low Numerical-Aperture Optical Projection Lithography on Copper-Clad Plastic Boards-Reference-Cited by-同舟云学术

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Low-Cost and High-Performance Micro-Fabrication Method Using Low Numerical-Aperture Optical Projection Lithography on Copper-Clad Plastic Boards

Published:2003-06-30 Issue:Part 1, No. 6B Volume:42 Page:4031-4036
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Hirota Katsunori,Ozaki Miyu,Horiuchi Toshiyuki

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/42/i=6S/a=4031/pdf

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Application of Matrix Projection Exposure Using a Liquid Crystal Display Panel to Fabricate Thick Resist Molds;Japanese Journal of Applied Physics;2009-08-20

2. Optical lithography onto inside surfaces of small-diameter pipes;Microelectronic Engineering;2008-05

3. Analysis of Aspect Ratio for Replicating Thick and Dense Resist Patterns;Journal of Photopolymer Science and Technology;2008

4. Fabrication of micro-coils using laser scan lithography on copper pipes;Microelectronic Engineering;2006-04

5. Micro-gear fabrication using optical projection lithography on copper-clad plastic substrates and electroplating of nickel;Microelectronic Engineering;2006-04

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