Author:
Hiroshima Hiroshi,Komuro Masanori,Kasahara Nobuyuki,Kurashima Yuichi,Taniguchi Jun
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
57 articles.
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1. Droplet-Dispensed Ultraviolet Nanoimprint Lithography in Mixed Condensable Gas of Trans-1,3,3,3-Tetrafluoropropene and Trans-1-Chloro-3,3,3-Trifluoropropene;Journal of Photopolymer Science and Technology;2022-12-16
2. Suppression of resist pattern collapse by crosslinker in ultraviolet nanoimprinting involving sequential infiltration synthesis with trimethylaluminum;Journal of Vacuum Science & Technology B;2021-05
3. Interfacial Interactions during Demolding in Nanoimprint Lithography;Micromachines;2021-03-24
4. Frontiers of light manipulation in natural, metallic, and dielectric nanostructures;La Rivista del Nuovo Cimento;2021-01
5. Solubility Property of Condensable Gases of Trans-1-Chloro-3,3,3-Trifluoropropene and Trans-1,3,3,3-Tetrafluoropropene in UV Nanoimprint;Journal of Photopolymer Science and Technology;2019-06-24