Actinometry Measurement of Dissociation Degrees of Nitrogen and Oxygen in N2–O2Microwave Discharge Plasma-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Actinometry Measurement of Dissociation Degrees of Nitrogen and Oxygen in N2–O2Microwave Discharge Plasma

Published:2010-10-20 Issue:10 Volume:49 Page:106101
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Ichikawa Yosuke,Sakamoto Takeshi,Nezu Atsushi,Matsuura Haruaki,Akatsuka Hiroshi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference48 articles.

1. Production of O atoms in Ar-O2 and N2-O2 microwave flowing post-discharges

2. The discharge tube material influence on N2–O2 DC glow discharge

3. Dependence of nitriding degree of Ti surface by non-LTE nitrogen plasma on various plasma parameters

4. Nitriding of titanium in microwave discharges

Cited by 32 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Part-Level Fault Classification of Mass Flow Controller Drift in Plasma Deposition Equipment;IEEE Transactions on Semiconductor Manufacturing;2024-08

2. Plasma-generated nitric oxide water: A promising strategy to combat bacterial dormancy (VBNC state) in environmental contaminant Micrococcus luteus;Journal of Hazardous Materials;2024-01

3. Effects of high energy electrons on electron temperature measurements of asymmetric double Langmuir probes;Physics of Plasmas;2023-07-01

4. Discussion on Electron Temperature of Gas-Discharge Plasma with Non-Maxwellian Electron Energy Distribution Function Based on Entropy and Statistical Physics;Entropy;2023-02-02

5. In situ monitoring of plasma ignition step during photoresist stripping using O2/N2 and O2/Ar;Journal of the Korean Physical Society;2022-11-14

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3