Annealing and Composition Effects of (BaxSr1-x)Ta2O6Thin Films Fabricated by Sol–Gel Method-Reference-Cited by-同舟云学术

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Annealing and Composition Effects of (BaxSr1-x)Ta2O6Thin Films Fabricated by Sol–Gel Method

Published:2010-09-21 Issue:9 Volume:49 Page:09MA14
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Lu Li,Nishida Takashi,Echizen Masahiro,Uchiyama Kiyoshi,Uraoka Yukiharu

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference18 articles.

1. Alternative dielectrics to silicon dioxide for memory and logic devices

2. SrTa2O6 thin films for high-K dielectric applications grown by chemical vapor deposition on different substrates

3. A Comparison of Defect States in Tantalum Pentoxide (Ta2O5) Films after Rapid Thermal Annealing inO2orN2Oby Zero-Bias Thermally Stimulated Current Spectroscopy

4. Structure and Electrical Properties of Thin Ta2O5Deposited on Metal Electrodes

5. Electrical characteristics of rf-magnetron sputtered BaTa2O6 thin film

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. SrTa2O6 induced low voltage operation of InGaZnO thin-film transistors;Thin Solid Films;2018-11

2. Local structure and dielectric behavior of tetragonal tungsten bronzes β-SrTa₂O₆ and β′-SrTa₂O₆;Journal of the Ceramic Society of Japan;2015

3. Effects of Si and Ti impurities on electrical properties of sol–gel-derived amorphous SrTa2O6 thin films by UV/O3 treatment;Applied Physics A;2012-11-16

4. Thermally Stimulated Current Analysis of Defects in Sol–Gel Derived SrTa$_{2}$O$_{6}$ Thin-Film Capacitors;Japanese Journal of Applied Physics;2012-09-20

5. Thermally Stimulated Current Analysis of Defects in Sol–Gel Derived SrTa2O6Thin-Film Capacitors;Japanese Journal of Applied Physics;2012-09-01

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