Surface Morphology of Diamond-Like Carbon Film and Si Wafer Milled with 30 keV Gallium Focused Ion Beam
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference17 articles.
1. Development of focused ion-beam repair for opaque defects on MoSi-based attenuated phase-shift mask
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Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Combining focused ion beam and atomic layer deposition in nanostructure fabrication;Nanotechnology;2014-02-20
2. Investigation of nano structures on ta-C films made by gallium FIB lithography;Diamond and Related Materials;2012-03
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