Enhanced Durability of Antisticking Layers by Recoating a Silica Surface with Fluorinated Alkylsilane Derivatives by Chemical Vapor Surface Modification-Reference-Cited by-同舟云学术

Enhanced Durability of Antisticking Layers by Recoating a Silica Surface with Fluorinated Alkylsilane Derivatives by Chemical Vapor Surface Modification

Published:2010-06-21 Issue:6 Volume:49 Page:06GL12
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Kohno Akihiro,Sakai Nobuji,Matsui Shinji,Nakagawa Masaru

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference22 articles.

1. Mold-assisted nanolithography: A process for reliable pattern replication

2. Uniformity in Patterns Imprinted Using Photo-Curable Liquid Polymer

3. Measurement of Adhesive Force Between Mold and Photocurable Resin in Imprint Technology

4. Fabrication of nanodot array molds for photonanoimprint using anodic porous alumina

5. Investigation of Application Availability of UV-NIL by Using Several Types of Photo-curable Resin

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