Author:
Somemura Yoh,Deguchi Kimiyoshi,Miyoshi Kazunori,Matsuda Tadahito
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
26 articles.
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1. Artificial Patterning of Nanostructures;Handbook of Nanophase and Nanostructured Materials;2003
2. Proximity X-ray and extreme ultraviolet lithography;Comptes Rendus de l'Académie des Sciences - Series IV - Physics;2000-09
3. X-ray imaging: applications to patterning and lithography;Journal of Physics D: Applied Physics;2000-05-31
4. Studies on Defect Inspectability and Printability Using Programmed-Defect X-Ray Mask;Japanese Journal of Applied Physics;1999-12-30
5. Optimum Phase Condition for Low-Contrast X-Ray Masks;Japanese Journal of Applied Physics;1999-12-30