Author:
Fujii Kiyoshi,Suzuki Katsumi,Matsui Yasuji
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
2 articles.
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1. Mask Error Factor in Proximity X-Ray Lithography;Japanese Journal of Applied Physics;2000-12-30
2. Mask error factor in proximity X-ray lithography;Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)