Author:
Nakashima Shin-ichi,Mizoguchi Kohji,Inoue Morio,Yoshida Masakatsu,Ishikawa Katsuya
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
2 articles.
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1. Damage analysis and engineering for ion implantation in ULSI process;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-04
2. Damage analysis and engineering for ion implantation in ULSI process;Ion Implantation Technology–92;1993