Fine Structure of O-Kinetic Energy Distribution in RF Plasma and Its Formation Mechanism
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering
Link
http://stacks.iop.org/1882-0786/2/i=12/a=126001/pdf
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1. Suppression of High-Energy Backscattered Particles in Magnetron Plasma Using Cylindrical Cathode
2. Suppression of Super High-Energy Species by VHF-DC Superimposed Magnetron Sputter Plasma
3. High-energy ions and atoms sputtered and reflected from a magnetron source for deposition of magnetic thin films
4. Generation processes of super-high-energy atoms and ions in magnetron sputtering plasma
5. Energy distribution of negative O−and OH−ions emitted from YBaCuO and iron garnet targets by dc and rf magnetron sputtering
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