Molecular Dynamics Simulations of Organic Polymer Dry Etching at High Substrate Temperatures
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference15 articles.
1. Modeling and simulation methods for plasma processing
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5. Plasma Induced Subsurface Reactions for Anisotropic Etching of Organic Low Dielectric Film Employing N2and H2Gas Chemistry
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