Nanostructured Refractory Metal Oxide Films Produced by a Pulsed Microplasma Cluster Source as Active Layers in Microfabricated Gas Sensors-Reference-Cited by-同舟云学术

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Nanostructured Refractory Metal Oxide Films Produced by a Pulsed Microplasma Cluster Source as Active Layers in Microfabricated Gas Sensors

Published:2011-01-20 Issue: Volume:50 Page:01AK01
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Barborini Emanuele,Ducati Caterina,Leccardi Matteo,Bertolini Giacomo,Repetto Pietro,Milani Paolo

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference19 articles.

1. Combinatorial libraries of semiconductor gas sensors as inorganic electronic noses

2. A New Detector for Gaseous Components Using Semiconductive Thin Films.

3. Toward innovations of gas sensor technology

4. The effect of grain size on the sensitivity of nanocrystalline metal-oxide gas sensors

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1. Supersonic Cluster Beam Deposition for the Integration of Functional Nanostructured Films in Devices;Advances in Fabrication and Investigation of Nanomaterials for Industrial Applications;2024

2. Resistive switching characteristics of Ag2O/TiO2 bilayer film based memristor;Journal of Molecular Structure;2023-09

3. Stoichiometry and disorder influence over electronic structure in nanostructured VOx films;Journal of Nanoparticle Research;2021-01

4. Towards low voltage resistive switch in sol-gel derived TiO2/Ta2O5 stack thin films;Materials & Design;2016-09

5. Microplasma: A New Generation of Technology for Functional Nanomaterial Synthesis;Plasma Chemistry and Plasma Processing;2015-08-15

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