Author:
Ishikawa Junzo,Takagi Toshinori
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
7 articles.
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1. Development of MEVVA ion source;Review of Scientific Instruments;1994-04
2. High‐current‐density metal‐ion implantation;Review of Scientific Instruments;1992-04
3. The Physics of Ion-Beam Lithography;The Physics of Submicron Lithography;1992
4. Development of high current metal ion beam source;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02
5. Metal vapor vacuum arc ion source;Review of Scientific Instruments;1986-06