Development of high current metal ion beam source
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference5 articles.
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3. Beam-Plasma Type Metal Ion Source
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5. Proc. 9th Symp. on ISIAT'85;Sakudo,1985
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. The ‘‘TITAN’’ ion source;Review of Scientific Instruments;1994-10
2. Ion sources for ion implantation and ion beam modification of materials (invited);Review of Scientific Instruments;1994-04
3. High Current Metal Ion Beam Transport through a 90° Sector Magnet;Laser and Ion Beam Modification of Materials;1994
4. Experiment of wide energy range control for metal ion beam;Laser and Ion Beam Modification of Materials;1994
5. Ion sources for ion beam assisted thin‐film depositiona);Review of Scientific Instruments;1992-11
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