Author:
Yamamoto Kazuhiko,Sakashita Shinsuke,Sato Yoshihiro,Inoue Masao,Anma Masatoshi,Oosuka Tsutomu,Yugami Jiro
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
2 articles.
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1. Interaction of NiSi with dopants for metallic source/drain applications;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2010-01
2. Preparation of NiSi2Nanowires with Low Resistivity by Reaction Between Ni Coating and Silicon Nanowires;Applied Physics Express;2009-06-26