Qualitative Correspondences of Experimentally Obtained Growth Rates and Morphology of Single-Crystal Diamond with Numerical Predictions of Plasma and Gas Dynamics in Microwave Discharges for Various Substrate Holder Shapes-Reference-Cited by-同舟云学术

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Qualitative Correspondences of Experimentally Obtained Growth Rates and Morphology of Single-Crystal Diamond with Numerical Predictions of Plasma and Gas Dynamics in Microwave Discharges for Various Substrate Holder Shapes

Published:2006-10-24 Issue:10B Volume:45 Page:8177-8182
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Yamada Hideaki,Chayahara Akiyoshi,Mokuno Yoshiaki,Soda Yousuke,Horino Yuji,Shikata Shin-ichi,Fujimori Naoji

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Developments of elemental technologies to produce inch-size single-crystal diamond wafers;Diamond and Related Materials;2011-04

2. Model of Reactive Microwave Plasma Discharge for Growth of Single-Crystal Diamond;Japanese Journal of Applied Physics;2011-01-20

3. Model of Reactive Microwave Plasma Discharge for Growth of Single-Crystal Diamond;Japanese Journal of Applied Physics;2011-01-01

4. Simulation with an improved plasma model utilized to design a new structure of microwave plasma discharge for chemical vapor deposition of diamond crystals;Diamond and Related Materials;2008-04

5. Simplified description of microwave plasma discharge for chemical vapor deposition of diamond;Journal of Applied Physics;2007-03-15

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