Simplified description of microwave plasma discharge for chemical vapor deposition of diamond
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2711811
Reference27 articles.
1. Diamond synthesis from gas phase in microwave plasma
2. Very high growth rate chemical vapor deposition of single-crystal diamond
3. The effect of nitrogen addition during high-rate homoepitaxial growth of diamond by microwave plasma CVD
4. Synthesizing single-crystal diamond by repetition of high rate homoepitaxial growth by microwave plasma CVD
5. Modeling the electromagnetic excitation of a microwave cavity plasma reactor
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