Preparation of 3-inch Diamond Film on Silicon Substrate for Thermal Management
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Published:2023
Issue:
Volume:
Page:476
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ISSN:1000-324X
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Container-title:Journal of Inorganic Materials
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language:en
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Short-container-title:Journal of Inorganic Materials
Author:
Zhiliang YANG,Ao YANG,Peng LIU,Liangxian CHEN,Kang AN,Junjun WEI,Jinlong LIU,Lishu WU,Chengming LI
Publisher
Shanghai Institute of Ceramics
Subject
Inorganic Chemistry,General Materials Science