Overview of Interconnect--Copper and Low-k Integration

Author:

Dixit Girish,Havemann Robert

Publisher

CRC Press

Reference95 articles.

1. Edelstein, D., J. Heidenreich, R. Goldblatt, W. Cote, C. Uzoh, N. Lustig, P. Roper, et al. "Full Copper Wiring in a Sub-0.25 mm CMOS ULSI Technology." Tech. Dig. IEEE Int. Electron Devices Meeting (1997): 773-6.

2. Venkatesan, S., A. V. Gelatos, V. Misra, B. Smithe, R. Islam, J. Cope, B. Wilson, et al. "A High Performance 1.8 V, 0.20 mm CMOS Technology with Copper Metallization." Tech. Dig. IEEE Int. Electron Devices Meeting (1997): 769-72.

3. VLSI on-chip interconnection performance simulations and measurements

4. Stamper, A. K., T. L. McDevitt, and S. L. Luce. "Sub-0.25-micron Interconnection Scaling: Damascene Copper Versus Subtractive Aluminum." 9th IEEE/SEMI Adv. Semicond. Manuf. Conf. Workshop (1998): 337-46.

5. Deutsch, A., H. Harrer, C. W. Surovic, G. Hellner, D. C. Edelstein, R. D. Goldblatt, G. A. Biery, et al. "Functional High-Speed Characterization and Modeling of a Six-Layer Copper Wiring Structure and Performance Comparison with Aluminum On-Chip Interconnections." Tech. Dig. IEEE Int. Electron Devices Meeting (1998): 295-8.

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