Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology
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CRC Press
Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
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2. Microelectrical sensors as emerging platforms for protein biomarker detection in point-of-care diagnostics;Expert Review of Molecular Diagnostics;2009-10
3. Photo and thermal polymerization of epoxides and vinyl ethers by novel sulfonium salts;Journal of Applied Polymer Science;2008
4. Early Study on Nanoimprint Lithography in the 1970s;Journal of the Japan Society for Precision Engineering;2008
5. Photonic band-gap enhanced second-harmonic generation in a planar lithium niobate waveguide;Laser Physics;2006-06
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