Application of Polymers to Photoresist Materials

Author:

SOYANO Akimasa

Publisher

Society of Rubber Industry, Japan

Subject

General Medicine

Reference21 articles.

1. 1) Okamoto, S.; Suzuki, A.; Ueno, T.: “Hajimete no Handotai Lithography Gijutsu”, Kogyo Chosakai, Tokyo , Chapter 7 (2003)

2. 2) Shima, M.: Photopolymer Koshukai Yoshishu, VI-3 (2009)

3. 3) Nonogaki, S.; Ueno, T.; Ito, T.: “Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology”, Marcel Dekker (1998)

4. 4) Ueno, T.: In “Microlithography”, Sheats, J. R.; Smith, B. W. Eds., Marcel Dekker Inc. (1998)

5. 5) Ito, H.; Wilson, C. G.: ACS Symp. Ser., 242, 11 (1984)

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