Author:
Watanabe Takeo,Haruyama Yuichi,Shiono Daiju,Emura Kazuya,Urayama Takuro,Harada Tetsuo,Kinoshita Hiroo
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Reference8 articles.
1. 1. H. Kinoshita, K. Kurihara, Y. Ishii and Y. Torii, J. Vac. Sci. & Technol., B7 (1989) 1648.
2. 2. H. Ito, C. G. Willson, and J. M. J. Frechet, Digest of Tech. Papers 1982 Symp. VLSI Tech., (1982) 86.
3. Chemical amplification in the design of dry developing resist materials
4. 4. H. Ito, G. Breyta, D. Hofer, R. Sooriyakumaran, K. Petrillo, and D. Seeger, J. Photopolym. Sci. Technol., 7 (1994) 433.
5. 7. T. Watanabe, H. Hada, S. Y. Lee, H. Kinoshita, K. Hamamoto and H. Komano, Jpn. J. Appl. Phys., 44 (2005) 5866.
Cited by
9 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献