Affiliation:
1. Department of Physics and Electronics, Osaka Prefecture University
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Reference20 articles.
1. 1. H. Kinoshita, K. Kurihara, Y. Ishii, and Y. Torii, J. Vac. Sci. Technol., B, 7 (1989) 1648.
2. 2. C. W. Gwyn, R. Stulen, D. Sweeney, and D. Attwood, J. Vac. Sci. Technol., B, 16 (1998) 3142.
3. 3. H. Ito and C. G. Willson, Polym. Eng. Sci., 23 (1983) 1012.
4. 4. L. F. Thompson, C. G. Willson, and M. J. Bowden, “Introduction to Microlithography”, 2nd ed., (1994) 87.
5. 5. T. Kozawa, A. Saeki, and S. Tagawa, J. Vac. Sci. Technol., B, 22 (2004) 3489.
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