Author:
Kojima Ryoota,Takahashi Takanori,Mizawa Takahide
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Reference6 articles.
1. [1] S.Y. Chou, P.R. Krauss and P.J. Renstorm, J. Vac. Sci. Techmol. B., 14 (1996) 4129
2. [2] M.D. Austin, H. Ge, W. Wu, M. Li, Z. Yu, D. Wasserman, S.A. Lyon and S.Y. Chou, Appl. Phy. Lett., 84 (2004) 5299
3. [3] H. Park, K.J. Byeon, J.J. Jang, O. Nam and H. Lee, Microelectron. Eng, 88 (2011) 3207-3213
4. [4] H.W. Huang, J.D.Huang, S.Y. Kuo, K.Y. Lee and H.C. Kuo, Appl. Phy. Lett., 96 (2010) 263115
5. [5] S. Lin, 3rd Nanoimprint Technology Fair, 7-24, Tokyo (2012)
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献