Nanoimprint Materials Systems-Reference-Cited by-同舟云学术

Nanoimprint Materials Systems

Published:2008 Issue:4 Volume:21 Page:563-572
ISSN:0914-9244
Container-title:Journal of Photopolymer Science and Technology
language:en
Short-container-title:J. Photopol. Sci. Technol.

Author:

Houle F. A.,Miller D. C.,Fornof A.,Trung H.,Raoux S.,Sooriyakumaran R.,Ito H.,Hart M.

Publisher

Technical Association of Photopolymers, Japan

Subject

Materials Chemistry,Organic Chemistry,Polymers and Plastics

Link

http://www.jstage.jst.go.jp/article/photopolymer/21/4/21_4_563/_pdf

Reference36 articles.

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3. 3. H. Schift, J. Vac. Sci. Technol. B 26, 458 (2008).

4. 4. W. J. Dauksher, N. V. Le, K. A. Gehoski, E. S. Ainley, K. J. Nordquist and N. Joshi, Proc. SPIE 6517 (2007) 651714-1.

5. 5. I. McMackin, W. Martin, J. Perez, K. Selenidis, J. Maltabes, F. Xu, D. Resnick and S. V. Sreenivasan, J. Vac. Sci.Technol. B 26 (2008) 151.

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