1. 1. G. E. Moore, Proc. SPIE 2438, 2-17 (1995).
2. 2. ASML promotional data on EUV technology, downloaded from http://www.slideshare.net/ Knowledge_Broker/asml-euv-use-forecast, accessed on May 1.
3. 3. ASML presentation on future of EUV lithography, downloaded from http://www.euvlitho.com/ 2010/P14.pdf, accessed May 2, 2011.
4. 4. Data from 2010 ASML promotional literature, with 2011 EUV production tool data point added by the author, For similar data, see H. Levinson, JM3 8(5) 041501 (Oct-Dec. 2009).
5. 5. Ralph R. Dammel, JM3 1(3), 270-275 (2002); see also R. R. Dammel, Semiconductor Fabtech, 10, 253-268 (1999).