Chemical Structure–Physicochemical Property Relationships of Copolymers Utilizable for Negative-Tone Photoimaging via Chemical Amplification-Reference-Cited by-同舟云学术

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Chemical Structure–Physicochemical Property Relationships of Copolymers Utilizable for Negative-Tone Photoimaging via Chemical Amplification

Published:2024-03-14 Issue:12 Volume:16 Page:15286-15297
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Ko Yun Hee¹,Lee Hyeji¹,Kim Hyunseok²,Kim Seungjun¹,Ahn Chanjae³,Hur Su-Mi²^ORCID,Kwak Yoonhyun³,Kim Myungwoong¹^ORCID

Affiliation:

1. Department of Chemistry and Chemical Engineering, Inha University, Incheon 22212, Republic of Korea

2. School of Polymer Science and Engineering, Chonnam National University, Gwangju 61186, Republic of Korea

3. Material Research Center, Samsung Advanced Institute of Technology, Samsung Electronics, Suwon 16677, Republic of Korea

Funder

Samsung Advanced Institute of Technology

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.3c19522

Reference55 articles.

1. Miniaturization of electronics and its limits

2. The drive to miniaturization

3. A case study on modeling and optimizing photolithography stage of semiconductor fabrication process

4. Photolithography Control in Wafer Fabrication Based on Process Capability Indices With Multiple Characteristics

5. Photolithography for Minimal Fab System

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