A case study on modeling and optimizing photolithography stage of semiconductor fabrication process
Author:
Publisher
Wiley
Subject
Management Science and Operations Research,Safety, Risk, Reliability and Quality
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/qre.1149/fullpdf
Reference19 articles.
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2. Handbook of Semiconductor Manufacturing Technology
3. Boning DS Chung JE Statistical metrology: Understanding variation in semiconductor manufacturing 1996
4. Optimizing multi-response problems in the Taguchi method by fuzzy multiple attribute decision making;Tong;Quality and Reliability Engineering International,1997
5. Analyzing experiments with correlated multiple responses;Chiao;Journal of Quality Technology,2001
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