Multifunctional Top-Coats Strategy for DSA of High-χ Block Copolymers
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Published:2021-06-11
Issue:1
Volume:34
Page:11-16
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ISSN:0914-9244
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Container-title:Journal of Photopolymer Science and Technology
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language:en
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Short-container-title:J. Photopol. Sci. Technol.
Author:
Chevalier Xavier1, Correia Cindy Gomes2, Pound-Lana Gwenaelle3, Bézard Philippe3, Sérégé Matthieu3, Petit-Etienne Camille3, Gay Guillaume3, Cunge Gilles3, Cabannes-Boué Benjamin2, Nicolet Célia1, Navarro Christophe1, Cayrefourcq Ian1, Müller Marcus4, Hadziioannou Georges2, Iliopoulos Ilias5, Fleury Guillaume2, Zelsmann Marc3
Affiliation:
1. ARKEMA FRANCE 2. Univ. Bordeaux 3. Univ. Grenoble Alpes 4. Georg-August Universität Göttingen, Institute for Theoretical Physics 5. Laboratoire PIMM, Arts et Métiers Institute of Technology, CNRS, Cnam, HESAM Université
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Reference11 articles.
1. 1. X. Chevalier, C. Nicolet, R. Tiron, A. Gharbi, M. Argoud, J. Pradelles, M. Delalande, G. Cunge, G. Fleury, G. Hadziioannou, and C. Navarro, Proc. SPIE, 8680 (2013) 868006. 2. 2. C. M. Bates, T. Seshimo, M. J. Maher, W. J. Durand, J. D. Cushen, L. M. Dean, G. Blachut, C. J. Ellison, and C. G. Willson, Science, 338 (2012) 775. 3. 3. X. Chevalier, C. G. Correia, G. Pound-Lana, P. Bézard, M. Sérégé, C. Petit-Etienne, G. Gay, G. Cunge, B. Cabannes-Boué, C. Nicolet, C. Navarro, I. Cayrefourcq, M. Müller, G. Hadziioannou, I. Iliopoulos, G. Fleury, and M. Zelsmann, ACS Appl. Mater. Interfaces, 13 (2021) 11224. 4. 4. X. Chevalier, C. G. Correia, G. Pound-Lana, P. Bézard, M. Sérégé, C. Petit-Etienne, G. Gay, G. Cunge, B. Cabannes-Boué, C. Nicolet, C. Navarro, I. Cayrefourcq, M. Müller, G. Hadziioannou, I. Iliopoulos, G. Fleury, and M. Zelsmann, Proc. SPIE, 11612 (2021) 116120O. 5. 5. A. Legrain, G. Fleury, M. Mumtaz, C. Navarro, J. Arias-Zapata, X. Chevalier, I. Cayrefourcq, M. Zelsmann, ACS Appl. Mater. Interfaces, 9 (2017) 43043.
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